1100℃ Large Diameter Tube Furnace (6″/8.5″/11″)
1. Large-Diameter Processing Chamber:
Electric tube furnace is available with 6", 8.5", and 11" quartz tubes for large samples, pilot-scale research, and semiconductor wafer processing.
2. Independent Multi-Zone Temperature Control:
Electric tube furnace is optional single-, dual-, and three-zone heating delivers excellent temperature uniformity for demanding thermal processes.
- Shenyang Kejing
- Shenyang, China
- 10 working days
- 50 sets
- Information
High temperature laboratory furnace overview
This large diameter tube furnace is built for laboratories and pilot-scale research teams that need more internal volume than a standard 50 mm or 80 mm tube furnace can provide. It supports material sintering, annealing, diffusion and controlled-atmosphere thermal processing in a quartz tube environment. The high temperature lab furnace can be configured as a single-zone, dual-zone or three-zone system depending on the temperature uniformity and process profile required.
The large diameter high temperature lab furnace is especially suitable for larger samples, quartz boats, wafer-related research, ceramic parts, powder batches, metal components and scale-up experiments where sample size and heating length are important selection factors.
High temperature laboratory furnace core advantages
Large tube options: Φ6 inch × 1020 mm, Φ8.5 inch × 1020 mm or Φ11 inch × 1020 mm.
Hinged stainless-steel sealing flanges on both tube ends for convenient operation.
Right-side water-cooled flange with KF40 vacuum port for connection to bellows, pump and KF40 baffle valve.
High-purity alumina fiber chamber with high-temperature alumina coating to improve heating efficiency and service life.
Independent temperature control for each zone in multi-zone models.
Recommended Applications of high temperature lab furnace
Wafer annealing and diffusion experiments
Large ceramic sample sintering
Battery material scale-up research
Powder metallurgy heat treatment
Protective atmosphere annealing
Vacuum thermal processing of larger samples
Furnace Body and Large Tube Design
The furnace adopts a double-layer shell structure with an air-cooling system. Two alumina tube plugs are included and must be inserted into both ends of the tube during use to help maintain the constant temperature zone and protect sealing performance. The high-purity alumina fiber chamber helps reduce energy loss, while the coated furnace lining improves heating efficiency and extends chamber life.
According to the original specification, the furnace can be used as an annealing or diffusion furnace, and it can support up to an 8-inch wafer placed on a matching quartz boat when the correct tube and quartz boat configuration is selected.
Sealing Flange and Vacuum Connection
The right-side water-cooled flange includes a KF40 vacuum port, making it convenient to connect with KF40 bellows, pumps and KF40 baffle valves. If the pump uses a KF25 interface, a KF40-to-KF25 adapter is required. An optional temperature testing set can be added, including armored thermocouple, compensation wire and temperature instrument, to test the internal tube temperature.
Temperature Control System
The furnace includes a YD858 temperature controller with PID automatic temperature control and a 30-segment programmable process. The control accuracy is ±1°C. Each heating zone has an independent temperature control system, allowing single-zone, dual-zone and three-zone models to be selected according to the required process profile.
Technical Specifications
| Product name | Tube Furnace GSL-1100X-I/II/III-6”/8.5”/11”-S |
|---|---|
| Model | GSL-1100X-I/II/III-6”/8.5”/11”-S |
| Power supply | AC 220V, 50Hz |
| Power | 8 kW |
| Temperature | 1000°C working temperature; 1100°C for less than 1 hour |
| Recommended heating rate | ≤10°C/min |
| Thermocouple | Dual K type; one is used as a temperature scanner |
| Heating element | Molybdenum-doped iron-chromium-aluminum alloy |
| Heating zone length | Single-zone: 900 mm; dual-zone: 450 + 450 mm; three-zone: 200 + 200 + 200 mm |
| Tube size | Φ6 inch × 1020 mm / Φ8.5 inch × 1020 mm / Φ11 inch × 1020 mm |
| Sealing flange | Right-side water-cooled flange with KF40 vacuum port |
| Temperature controller | YD858 controller, PID automatic control, 30-segment programmable control |
| Control accuracy | ±1°C |
| PC connection | Default DB9 PC communication port |
| Certification note | MET certified controller/system reference as listed in the specification |
| Vacuum system | Optional dual rotary vane mechanical pump can reach 10-2 Torr; optional domestic or imported high-vacuum system can reach 10-5 Torr or better. Multiple Vacuum |
| Optional water chiller | CW-5000; compressor power 0.3 kW; flow rate 16 L/min; tank capacity 6 L; temperature control 5–30°C |
| Dimensions | 1880 mm (L) × 700 mm (W) × 930 mm (H) |
| Weight | Approx. 200 kg |
| Warranty | One-year warranty and lifetime maintenance; consumables such as heating elements, quartz tubes and sample crucibles are not included |
| Compliance | CE Certified, UL or CSA certification is available at extra cost. |
Optional Vacuum and Cooling Systems
For standard vacuum use, a dual rotary vane mechanical pump can reach approximately 10-2 Torr. For higher vacuum requirements, domestic or imported high-vacuum systems can be selected to reach 10-5 Torr or better. A CW-5000 water cooling system is available when water-cooled flange operation is required.
Selection Guide: 6 inch, 8.5 inch or 11 inch Tube Furnace
| Tube size | Recommended use |
|---|---|
| 6 inch tube furnace | Large laboratory samples, quartz boat processing, controlled atmosphere sintering and medium-volume research batches. |
| 8.5 inch tube furnace | Wafer-related experiments, larger ceramics, wider boats and research processes requiring more internal space. |
| 11 inch tube furnace | Large sample processing, pilot-scale thermal research and experiments where tube diameter is the main selection factor. |
Safety Notes
The pressure inside the quartz tube must not exceed 0.02 MPa relative pressure. When introducing gas into the quartz tube from a cylinder, a pressure reducing valve must be installed. Pressure below 0.02 MPa is recommended for safer operation.
The original specification does not recommend closing both inlet and exhaust valves during sample heating. If a process requires valve closure, the pressure gauge must be monitored at all times. If the indicated pressure exceeds 0.02 MPa, the vent valve must be opened immediately to prevent accidents such as tube rupture or flange ejection.
FAQ
What tube sizes are available?
The furnace is available with Φ6 inch × 1020 mm, Φ8.5 inch × 1020 mm and Φ11 inch × 1020 mm tube options.
What is the maximum temperature?
The working temperature is 1000°C, and the furnace can reach 1100°C for less than 1 hour.
Can it be configured with multiple heating zones?
Yes. Single-zone, dual-zone and three-zone heating configurations are available. The heating zone lengths are 900 mm, 450 + 450 mm and 200 + 200 + 200 mm respectively.
What vacuum interface does it use?
The right-side water-cooled flange uses a KF40 vacuum port. A KF40-to-KF25 adapter is needed when connecting to a KF25 pump interface.
Is water cooling optional?
Yes. The optional CW-5000 chiller has a 0.3 kW compressor, 16 L/min flow rate, 6 L tank capacity and 5–30°C temperature control range.
We have our own laboratory where we can conduct sample testing for you; you can proceed with the purchase only if the final results meet your expectations—though we are 99% confident they will.
