Why TQ6D-SP Quartz Nozzles Lead the Industry

In Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), and high-purity gas delivery systems, nozzles are critical components for controlling gas dynamics and chemical reaction rates. These environments typically involve high temperatures, highly corrosive gases, and stringent purity requirements—conditions under which metal nozzles often fall short.

With their superior physicochemical properties, TQ6D-SP quartz nozzles have become the preferred choice for semiconductor-grade laboratories and high-end manufacturing lines.

A. Metallic Contamination

In semiconductor processing, even trace amounts of metal impurities (such as Fe, Ni, or Cr) can cause device breakdown. Even after passivation, stainless steel nozzles can still release metal ions when exposed to acidic gas flows.

B. Dimensional Instability Due to Thermal Expansion

Metals have high coefficients of thermal expansion; inside a 1000°C furnace tube, the nozzle orifice diameter can undergo minute changes. This causes the gas flow field to drift, resulting in non-uniform thin-film deposition.

C. Frequent Replacement and Downtime (Short Lifespan)

While ceramic nozzles offer high-temperature resistance, they lack toughness and are prone to brittle fracture under thermal shock. Frequent system shutdowns to replace nozzles severely impact production efficiency.

Technical Advantages of TQ6D-SP Quartz Nozzles

A. High-Purity Fused Silica

TQ6D-SP nozzles are manufactured from quartz material. Its extremely low hydroxyl (OH) content ensures a low outgassing rate in vacuum environments, preventing the introduction of any volatile impurities.

B. Thermal Excellence (Extremely Low Thermal Expansion Coefficient)

Quartz has a thermal expansion coefficient of approximately 5.5 × 10-7/°C—only a fraction of that of stainless steel. This means the injection geometry of the TQ6D-SP remains constant whether operating at room temperature or at high temperatures up to 1100°C.

This nozzle is specifically designed for laboratory research environments, offering the following key advantages:

High-Temperature Resistance: Made from high-purity quartz, it withstands operating temperatures up to 1100°C. This allows for direct insertion into high-temperature furnace tubes or reaction chambers for spraying—conditions under which standard metal or plastic nozzles would melt or fail.

Chemical Purity: Quartz offers exceptional chemical stability, effectively preventing metal ion contamination during the spraying process. This is crucial for research involving materials highly sensitive to impurities, such as semiconductors and battery electrode materials.

Fine Atomization: With a nozzle diameter of just 0.3 mm, it achieves micron-level atomization. When paired with a precision syringe pump, it allows for exact control over droplet size and spray rate, ensuring uniform coatings or particles.

Strong Corrosion Resistance: With the exception of hydrofluoric acid and hot phosphoric acid, quartz is chemically inert against most acids, bases, and salt solutions, making it suitable for spraying a wide range of corrosive chemical reagents.

Simple Structure and Easy Integration: Equipped with a standard 1/4" fitting and PTFE tubing, it integrates easily with various laboratory gas and liquid handling systems (such as gas-liquid mixing tanks and peristaltic pumps).

Maintenance and Longevity Recommendations

Avoid Hydrofluoric Acid: Hydrofluoric acid (HF) is the primary enemy of quartz; strictly avoid contact with HF during cleaning.

Prevent Surface Scratches: While hard, quartz is brittle; minor surface scratches can become focal points for thermal stress. We recommend using specialized soft-tipped tweezers for handling.

Prevent Devitrification: During prolonged high-temperature operation, clean the nozzle regularly to prevent salt deposits on the surface, which can lead to quartz devitrification.

Why Choose Shenyang Kejing’s TQ6D-SP?

We offer not only standard products but also customization of orifice angles based on your specific furnace tube dimensions. This meticulous attention to detail ensures the high reproducibility of your experimental data.