High Vacuum Magnetron Sputtering Coating Equipment
1. Laboratory coating equipment has high effect presentation and greatly improves work accuracy.
2. Laboratory coating equipment is independently developed by us, with perfect control of technology.
3. Laboratory coating equipment is widely used and suitable for various types of films.
- Shenyang Kejing
- Shenyang, China
- 22 working days
- 50 sets
- Information
Introduction of Laboratory coating equipment:
VTC-800G is a small Magnetron sputtering coating equipment independently developed by us. Small coating equipment is widely used in the preparation of single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films and polytetrafluoroethylene films.
Small coating equipment can be equipped with a multi-target gun system, which supports RF power sputtering of non-conductive materials and DC power sputtering of conductive materials to meet various process requirements.
Compared with similar equipment, VTC-800G Small coating equipment is small in size, easy to operate and flexible in application. It is an ideal choice for laboratory preparation of functional thin film materials, especially suitable for research and development of new materials such as solid electrolytes and OLEDs.
Main features of Precision coating equipment:
1. Small coating equipment can be equipped with multiple target guns, supporting RF and DC power supplies, which are used for sputtering coating of non-conductive and conductive target materials respectively, and the target guns can be flexibly replaced as needed;
2. Precision coating equipment is compatible with the preparation of various functional films and has a wide range of applications;
3. Precision coating equipment is small in size, compact in structure, easy to operate, and suitable for various laboratory environments;
4. Precision coating equipment has a modular design, and the vacuum chamber, pump group, and power control system are separated and can be flexibly combined according to actual needs;
5. Laboratory coating equipment supports multiple power control methods: single power supply controls multiple target guns or multiple power supplies independently control target guns to meet different process requirements.
Technical parameters of Precision coating equipment:
| Product name | Magnetron sputtering coating equipment | |
| Product model | VTC-800G | |
| Main parameters | 1. Chamber structure: cylindrical top cover design, rear exhaust system. 2. Ultimate vacuum: 6.0×10-5 Pa. 3. Vacuum leakage rate: ≤0.5 Pa within 1 hour. 4. Exhaust time: about 30 minutes from atmosphere to 5.0×10-3 Pa. 5. Vacuum pump group configuration: mechanical pump + molecular pump. 6. Sample stage parameters: · Size: Ø205 · Temperature range: room temperature ~ 500℃, accuracy ±1℃ · Rotation speed: 5~20rpm (adjustable). 7. Bias function: optional (used to improve film quality). 8. Gas filling system: dual-channel mass flowmeter (argon/nitrogen each) 9. Target head angle: the angle between the target head and the central axis of the sample stage is 34° 10. Number of target heads: 2 as standard (can be expanded to 4 as an option). 11. Target gun cooling method: water cooling 12. Target material specifications: diameter Ø3″, thickness 0.1~5mm (depending on the target material） | |
13. Specifications of Magnetron sputtering coating equipment: · Overall size: 700mm×1093mm×1380mm |  | |
About us:
Our company has been deeply involved in the film making field for many years and has superb experience. At the same time, our company has a variety of equipment suitable for different materials to meet your various needs. We can also help you test the effect of the equipment. You can provide samples and we will prepare samples to let you see the effect of our products more intuitively. If you approve of our products, you can buy them and let you carry out your work more smoothly.
