Single Head High Vacuum Magnetron Plasma Sputtering Coater
VTC-600-1HD Single-Head Magnetron Sputtering Coater is a high vacuum coating equipment newly developed by our company, and is used to prepare single-layer or multi-layer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic films, dielectric film, optical film, oxide film, hard film, PTFE film, etc.
VTC-600-1HD single-head magnetron sputtering coater is equipped with one target gun, choosing a strong magnetic target or a weak magnetic target.
- Shenyang Kejing
- Shenyang, China
- 22 working days
- 50 sets
- Information
Product Introduction
The VTC-600-1HD Single-Target Magnetron Sputtering System is a newly developed high-vacuum coating instrument designed and manufactured by our company. It is specifically engineered for research institutions and laboratories to prepare a wide range of thin films. The system is suitable for fabricating single-layer or multilayer films such as ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard coatings, and PTFE films.
The VTC-600-1HD is equipped with one magnetron sputtering gun, which can be configured with either a strong magnetic target or a weak magnetic target depending on the application:
· The weak magnetic target is suitable for sputtering non-magnetic materials.
· The strong magnetic target is designed for efficient sputtering of ferromagnetic materials.
Featuring a high-vacuum chamber and a stable power control system, the VTC-600-1HD ensures excellent film uniformity and adhesion. Compared with similar equipment, it offers a compact design, easy operation, and broad material compatibility, making it an ideal choice for laboratory thin-film deposition and advanced materials research.
Main Features
1. It is equipped with one target gun, choosing one RF power supply for sputter coating of non-conductive materials or one DC power supply is used for sputter coating of conductive materials.
2. A variety of thin films can be prepared with a wide range of applications.
3. Small size and easy to operate
Technical Parameters
Product Name | VTC-600-1HD Single-Head Magnetron Sputtering Coater |
Product Model | VTC-600-1HD |
Installation Conditions | This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: The equipment is equipped with a self-circulating water cooler (filling with pure water or deionized water) 2. Electricity: AC220V 50Hz, must have good grounding 3. gas: The equipment chamber needs to be filled with argon gas (purity 99.99% or more), and argon gas cylinders (with Ø6mm double ferrule joints) and pressure reducing valve need to be provided by users. 4. Workbench: size 1500mm×600mm×700mm, bearing more than 200kg 5. Ventilation device: needed |
Major Parameters (Specification) | 1. Power supply voltage: 220V 50Hz 2. Power: <1KW (not including vacuum pump) 3. Inner diameter of Chamber: Ø300mm 4. Limit of vacuum degree: 9.0×10-4Pa 5. Heating temperature of sample stage: RT-500℃, accuracy ±1℃ (Temperature can be increased according to actual needs.) 6. Number of target guns: 1 pcs (other quantities for option) 7. Cooling method of target gun: water cooling 8. Size of target material: Ø2″, thickness 0.1-5mm (different thicknesses due to different target materials) 9. DC sputtering power: 500W; RF sputtering power: 300W (The type of target power supply is optional: one DC power supply or one RF power supply.) 10. Sample stage: Ø140mm, optional bias voltage function can be installed according to customer requirements to achieve higher quality of coating. 11. Speed of sample stage: adjustable within 1rpm-20rpm 12. Working gas: Ar and other inert gases 13. Intake air path: Mass flow meter controls 2 air-intake paths, one is 100SCCM and the other is 200SCCM. |
| Product Dimension and Weight | 1. main machine dimension: 500mm×560mm×660mm 2. Overall dimension: 1300mm×660mm×1200mm 3. Weight: 160kg 4. Vacuum chamber dimension: φ300×300mm |
Standard Accessories
| No. | Name | Quantity | Image |
| 1 | DC power control system (optional) | 1 set | - |
| 2 | RF power control system (optional) | 1 set | - |
| 3 | Water cooler | 1 pc | - |
| 4 | Polyester PU pipe (Ø6mm) | 4m | - |
Optional Accessories
| No. | Name | Function Category | Image |
| 1 | Various target materials such as gold, indium, silver, platinum, etc. | optional | - |
| 2 | Optional strong magnetic target for sputtering ferromagnetic materials | optional | - |
| 3 | Film thickness monitor system | optional | - |
| 4 | molecular pump (imported from Germany) | optional | - |
Warranty
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
Logistics
