Continuous Multi-chamber Evaporation Coating System
1. Our evaporation vacuum coating machine allows for continuous sample injection, making it highly suitable for professional experiments or projects.
2. Our evaporation vacuum coating machine is fully automated, saving money on personnel and training costs.
3. The evaporation vacuum coating machine is equipped with four working zones, accelerating project progress and allowing for separate heating.
- Shenyang Kejing
- Shenyang, China
- 10 working days
- 50 sets
- Information
Introduction of the evaporation vacuum coating machine:
The GSL-1800X-ZF-AM continuous evaporation coating machine is a high-vacuum, continuous sample injection professional-grade evaporation coating device. The continuous evaporation coating machine adopts a multi-chamber structure design with a transfer chamber and an evaporation coating chamber, enabling continuous sample transfer and automated coating operations in a stable vacuum environment. The substrate holder reciprocates between the two chambers, achieving fully automated synchronous operation driven by a frequency-modulated motor. The reciprocating position and speed of the continuous evaporation coating machine are settable, and it features dual-chamber positioning and origin reset functions, significantly improving experimental efficiency and coating repeatability.
The continuous evaporation coating machine is particularly suitable for evaporation coating of oxygen-sensitive metal materials (such as Ti, Al, Au, etc.) and small-molecule organic materials. The thermal evaporation vacuum coating system is equipped with four independently controlled evaporation heating boats, each capable of performing an independent evaporation process. A rotatable baffle structure above each heating boat effectively shields other boats during single-boat operation, preventing cross-contamination of the evaporated material and ensuring film purity.
By changing some configurations, the thermal evaporation vacuum coating system can also support the evaporation coating of various organic materials, making it ideal for research on advanced materials such as OLED light-emitting devices and organic photovoltaics (OPV). Five water-cooled electrodes are located at the bottom of the chamber, continuously protecting the electrodes during high-temperature evaporation to prevent thermal melting damage and improve system durability and stability.
The GSL-1800X-ZF-AM thermal evaporation vacuum coating system employs a highly reliable metal vacuum chamber, achieving a maximum system vacuum of 5.0 × 10⁻⁷ Torr. The sample stage can heat samples (room temperature – 500℃), providing a stable and controllable thermal environment for high-quality thin film deposition. With its high vacuum performance, process flexibility, and excellent cost-effectiveness, the thermal evaporation vacuum coating system is an ideal choice for research institutions and laboratories conducting high-vacuum evaporation coating research.
Advantages of the evaporation vacuum coating machine:
· Multi-chamber design of continuous evaporation coating machine: Composed of a transfer chamber and an evaporation coating chamber, enabling rapid and continuous sample evaporation coating.
· Centralized vacuum control management: The vacuum unit is integrated into an integrated control box for easy operation.
· Independent evaporation current control: Facilitates precise adjustment of the evaporation rate.
· The chamber is equipped with one KF40 bypass valve (directly connected to the forepump for improved pumping efficiency), one CF150 gate valve (directly connected to the molecular pump), one KF16 flange (for mounting a resistance gauge), and six CF35 flanges (one for an ionization gauge, one for a 2-pin electrode, one for a film thickness gauge, and three spare interfaces).
· High-efficiency water cooling system: Five water-cooled electrodes are located at the bottom of the chamber, supporting four vapor deposition heating boats simultaneously.
· The sample stage of the evaporation vacuum coating machine features a top-mounted design for easy installation and operation.
· Optional high-resolution film thickness gauge: Aluminum film thickness measurement accuracy up to 0.1 Å.
· The evaporation vacuum coating machine can be equipped with a circulating water chiller to ensure long-term operational stability.
Technical parameters of the evaporation vacuum coating machine:
| Product Name | GSL-1800X-ZF-AM Continuous Evaporation Coating Machine |
| Product Model | GSL-1800X-ZF-AM |
Installation Requirements of vacuum coating system | 1. This thermal evaporation vacuum coating system is suitable for use in environments with a temperature of 25℃±15℃ and a relative humidity of 55%RH±10%. 2. Water Source: The thermal evaporation vacuum coating system is equipped with a self-circulating cooling water system, requiring the addition of purified or deionized water. 3. Power Supply of vacuum coating system: Single-phase AC220V 50Hz, with reliable grounding required. 4. Workbench of vacuum coating system: Floor-standing, recommended floor area of at least 2 square meters, ensuring stable placement of the equipment. 5. Ventilation: Requires good ventilation or exhaust systems to ensure operational safety and effective heat dissipation. |
| Parameters of vacuum coating system | 1. Power Input: Single-phase AC220V, 50/60Hz, power <2.16kW (excluding vacuum pump). 2. Evaporation Output: Voltage AC 0–8V continuously adjustable, maximum evaporation current 200A, maximum evaporation power <1.6kW. 3. Vacuum Chamber: Inner diameter Ø300mm × Height 360mm, stainless steel, inner wall electropolished. 4. Observation Window: Ø100mm, using a special sealing ring to ensure airtightness. 5. Vacuum Pump: High-speed turbomolecular pump, pumping speed 600L/s. 6. Working Vacuum: 8.0×10⁻⁴Pa. 7. Ultimate Vacuum: 8.0×10⁻⁵Pa. 8. Leakage Rate: 6.7×10⁻⁸Pa·L/s. 9. Sample Stage: Diameter φ120mm. 10. Distance between Evaporation Boat and Sample Stage: Adjustable 140–200mm. 11. Cooling Water Requirement: 15L/min. 12. Sample Stage Heating Temperature: Room temperature～500℃, supports automatic temperature control and temperature measurement. |
| Compliance | CE Certified, UL or CSA certification is available at extra cost. |
About us:
As a company focused on the scientific research market, our customers mainly come from colleges and universities, scientific research institutions and laboratories. We are always committed to serving the society through innovative technology, focusing on customers, and providing professional and efficient scientific research services. Our goal is to become a leader in the field of scientific research instruments that is trustworthy, respected, and has international influence and competitiveness.
