Hi-Speed Spin Coater With 200ºC Heating Cover
VTC-100PA-II Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. It can be used for strong acid and strong alkali coating solution. The equipment is equipped with two vacuum chucks of different sizes (for standard) selected according to the size of the sample. The equipment can store 12 sets of programs, and each set contains 6 running stages.
- Shenyang Kejing
- Shenyang, China
- 10 working days
- 50 sets
- Information
Product Introduction
The VTC-100PA-II Heated Vacuum Spin Coater is designed for surface coating processes in semiconductors, crystals, optical discs, photolithography, and related applications. It is capable of preparing coatings using both strong acidic and alkaline solutions.
The system is equipped with two vacuum chucks of different sizes, allowing users to select the appropriate chuck according to the sample dimensions. During operation, the sample is securely fixed onto the holder by vacuum suction. The coater supports up to 12 programmable recipes, with each recipe containing 6 sequential stages. In each stage, the spin speed can be set independently, enabling the system to gradually accelerate to the maximum speed. This ensures uniform thin-film formation across the sample surface while minimizing material waste and improving efficiency.
The VTC-100PA-II Heated Vacuum Spin Coater features user-friendly operation, easy cleaning, and compact design, making it an ideal choice for laboratories in universities and research institutes engaged in thin film preparation.
Main Features
1. The sample is fixed by means of vacuum adsorption, which is easy to operate.
2. The degree of vacuum can reach -0.08MPa.
3. Samples can be easily centered using the positioning tool to reduce vibration or fly-outs caused by misalignment.
4. Different chucks can be used according to sample specifications, and the replacement is convenient and simple.
5. A 24V brushless DC motor is adopted and it has the advantages of high reliability, strong adaptability, simple repair and maintenance, low noise, small vibration, stable operation, fast and stable startup, stable operation after acceleration, to ensure the consistency and uniformity of coating thickness.
6. The oilless parallel-bar vacuum pump has the advantages of small size, simple structure, easy operation, convenient maintenance, and no environmental pollution.
7. The chamber is made of polypropylene material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.
8. Coating can be carried out in an inert gas atmosphere (such as Ar, N2).
9. English operating system
10. It has the function of open-cover protection. When the top cover is opened during the coating process or at the end of the coating, the machine immediately decelerates rapidly until it stops.
11. The control interface adopts a touch screen plus single-board computer control system, and the numerical display is more intuitive and reliable.
Technical Parameters
Product Name | VTC-100PA-II Vacuum Spin Coater with Heating Function | |
Product Model | VTC-100PA-II | |
Installation Conditions | 1. Temperature & Humidity: 10–85% RH (at 25 °C, non-condensing); operating temperature: 0–45 °C. 2. Environment: Free from strong vibration sources and corrosive gases. 3. Water Supply: Equipped with a wastewater outlet. 4. Power Supply: Single-phase AC220V, 50Hz, 10A . 5. Gas Supply: Vacuum negative pressure (vacuum pump) with pumping speed ≥70 L/min. The system can also be purged with protective inert gases such as Ar or N₂. 6. Workbench: Recommended size 800mm × 600 mm× 700 mm, with load capacity ≥50 kg (solid cement bench preferred). 7. Ventilation: No special requirements. | |
Main Parameters (specification) | 1. Power supply interface: Main unit: AC220V 50Hz 10A; Heating: AC220V 50Hz 10A 2. Total power: ≤1150W (excluding external vacuum pump) 3. Coating chamber (material): PTFE 4. Sample holder (vacuum chuck): PTFE chucks Φ19mm and Φ60mm, one each 5. Operating mode: Up to 12 storable programs; each program contains 6 operation stages 6. Spin speed: 500 rpm – 10,000 rpm (effective) 7. Acceleration/deceleration rate: Adjustable range per stage: 100 rpm – 2000 rpm 8. Spin time: Adjustable range per stage: 0 – 60 s 9. Speed stability: ±1% 10. Control system: PCB microcontroller, keypad control, LMC LCD display 11. Heating method: Carbon fiber heating tube with independent temperature control system, not linked to main unit control 12. Heating temperature: Room temperature – 200℃ 13. Heating power: AC220V 1000W 14. Temperature control accuracy: ±2℃ | |
15. Product Specifications: · Dimension：450mm×340mm×280mm · Weight：20kg |
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Standard Accessories
No. | name | qty | picture |
1 | Vacuum Chuck (including O-ring) (Ø19mm and Ø60mm) | 2 pcs | |
2 | Central Positioner/Locator (including 4 positioning studs) | 1 pcs |
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3 | Epoxy Injector/Syringe (20ml) | 1 pcs | |
4 | Injector/Syringe Bracket | 1 pcs | - |
5 | Oilless Vacuum Pump | 1 pcs | |
6 | Rubber Pipe (including clamp) | 1 pcs | - |
Optional Accessories
No. | name | functional type | picture |
1 | Vacuum Chucks of other specifications | (optional) | |
2 | Pipette (made in China) | (optional) | |
3 | Pipette (imported) | (optional) |
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Warranty
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
Logistics
