Hi-Speed Spin Coater With 100ºC Heating Cover

Hi-Speed Spin Coater With 100ºC Heating Cover

VTC-100PA-I Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. It can be used for strong acid and strong alkali coating solution. The equipment is equipped with two vacuum chucks of different sizes (for standard) selected according to the size of the sample. The equipment can store 12 sets of programs, and each set contains 6 running stages.

Brand: Shenyang Kejing
Product origin: Shenyang, China
Delivery time: 10 working days
Supply capacity: 50 sets

Information

Product Introduction
The VTC-100PA-I Vacuum Spin Coater is designed for surface coating processes in semiconductors, crystals, optical discs, and photolithography. It is suitable for preparing coatings using strong acid or alkaline solutions. The system comes standard with two vacuum chucks of different sizes, allowing users to choose the appropriate chuck based on sample dimensions.

During operation, the sample is securely fixed onto the sample stage using a vacuum chuck. The VTC-100PA-I can store up to 12 programs, with each program consisting of 6 sequential steps. The rotational speed varies across different stages, enabling the device to gradually ramp up to its maximum speed. This ensures uniform thin-film formation on the sample surface, minimizes material waste, and improves efficiency.

The VTC-100PA-I features simple operation, easy cleaning, and a compact design. It is widely applied in laboratories of universities and research institutes for thin-film deposition processes.

Main Features

1. The sample is fixed by means of vacuum adsorption, which is easy to operate.

2. The degree of vacuum can reach -0.08MPa.

3. Samples can be easily centered using the positioning tool to reduce vibration or fly-outs caused by misalignment.

4. Different chucks can be used according to sample specifications, and the replacement is convenient and simple.

5. A 24V brushless DC motor is adopted and it has the advantages of high reliability, strong adaptability, simple repair and maintenance, low noise, small vibration, stable operation, fast and stable startup, stable operation after acceleration, to ensure the consistency and uniformity of coating thickness.

6. The oilless parallel-bar vacuum pump has the advantages of small size, simple structure, easy operation, convenient maintenance, and no environmental pollution.

7. The chamber is made of polypropylene material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.

8. Coating can be carried out in an inert gas atmosphere (such as Ar, N2).

9. English operating system

10. It has the function of open-cover protection. When the top cover is opened during the coating process or at the end of the coating, the machine immediately decelerates rapidly until it stops.

11. The control interface adopts a touch screen plus single-board computer control system, and the numerical display is more intuitive and reliable.

Technical Parameters

Product Name	VTC-100PA-I Vacuum Spin Coater
Product Model	VTC-100PA-I
Installation Conditions	1. Temperature & Humidity: 10–85%RH (at 25°C, non-condensing); Operating temperature: 0–45°C. 2. Environment: Free from strong vibration sources and corrosive gases. 3. Water: Equipped with a drainage outlet. 4. Power Supply: Single-phase AC220V 50Hz 10A. 5. Gas: Vacuum (negative pressure) with a pumping speed ≥70 L/min; the system can also be connected to protective inert gases (e.g. Ar, N₂). 6. Workbench: Recommended size 800 mm × 600 mm × 700 mm, load capacity ≥50 kg (solid concrete table preferred). 7. Ventilation: No special requirements.
Main Parameters (Specification)	1. Power Supply Interface: · Main Unit：AC220V 50Hz 10A · Heating：AC220V 50Hz 10A 2. Total Power Consumption: ≤1150W (excluding external vacuum pump) 3. Coating Chamber (Material): Polypropylene 4. Sample Holder (Vacuum Chuck): PTFE vacuum chucks, Ø19 mm and Ø60 mm (one each) 5. Operation Mode: Up to 12 programmable recipes; each recipe includes 6 sequential stages 6. Spin Speed Range: 500–10,000 rpm (effective) 7. Acceleration/Deceleration Rate: Adjustable from 100 rpm to 2000 rpm per stage 8. Coating Time: 0–60 seconds per stage 9. Speed Stability: ±1% 10. Control System: PCB microcontroller with keypad control and LMC LCD display 11. Heating Method: Independent carbon fiber heating tube system (separate from main unit control) 12. Heating Temperature Range: Room temperature to 100°C 13. Heating Power: AC220V, 1000W 14. Temperature Control Accuracy: ±2°C
	15. Product Specifications： · Dimension: 450mm×340mm×280mm · Weight: 20kg

Standard Accessories

No.	name	qty	picture
1	Vacuum Chuck (including O-ring) (Ø19mm and Ø60mm)	2 pcs
2	Central Positioner/Locator (including 4 positioning studs)	1 pcs
3	Epoxy Injector/Syringe (20ml)	1 pcs
4	Injector/Syringe Bracket	1 pcs	-
5	Oilless Vacuum Pump	1 pcs
6	Rubber Pipe (including clamp)	1 pcs	-