Hi-Speed Spin Coater (10K rpm & 5" Max)

VTC-100PA Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. It can be used for strong acid and strong alkali coating solution. The equipment is equipped with two vacuum chucks of different sizes (for standard) selected according to the size of the sample. The equipment can store 12 sets of programs, and each set contains 6 running stages.

Brand: Shenyang Kejing
Product origin: Shenyang, China
Delivery time: 10 working days
Supply capacity: 50 sets

Information

Product Introduction

The VTC-100PA Vacuum Spin Coater is designed for surface coating processes in semiconductors, crystals, optical discs, and photolithography. It is also suitable for preparing films using strong acid or strong alkaline coating solutions.

The unit comes standard with two vacuum chucks of different sizes, allowing users to select the appropriate chuck according to the sample dimensions. During operation, the VTC-100PA secures the sample onto the chuck via vacuum suction. The device can store up to 12 programs, with each program containing 6 operating stages. Different stages correspond to different spin speeds, enabling the coater to gradually ramp up to the maximum speed. This ensures uniform film formation on the sample surface while reducing material waste and improving efficiency.

With features such as easy operation, convenient cleaning, and a compact footprint, the VTC-100PA Vacuum Spin Coater is widely used in laboratories of universities, research institutes, and R&D facilities for thin film fabrication.

Main Features

1. The sample is fixed by means of vacuum adsorption, which is easy to operate.

2. The degree of vacuum can reach -0.08MPa.

3. Samples can be easily centered using the positioning tool to reduce vibration or fly-outs caused by misalignment.

4. Different chucks can be used according to sample specifications, and the replacement is convenient and simple.

5. A 24V brushless DC motor is adopted and it has the advantages of high reliability, strong adaptability, simple repair and maintenance, low noise, small vibration, stable operation, fast and stable startup, stable operation after acceleration, to ensure the consistency and uniformity of coating thickness

6. The oilless parallel-bar vacuum pump has the advantages of small size, simple structure, easy operation, convenient maintenance, and no environmental pollution.

7. The chamber is made of PP material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.

8. Coating can be carried out in an inert gas atmosphere (such as Ar, N₂).

9. English operating system

10. It has the function of open-cover protection. When the top cover is opened during the coating process or at the end of the coating, the machine immediately decelerates rapidly until it stops.

11. The control interface adopts a touch screen plus single-board computer control system, and the numerical display is more intuitive and reliable.

Technical Parameters

Product Name	VTC-100PA Vacuum Spin Coater
Product Model	VTC-100PA
Installation Conditions	This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: equipped with water inlet and outlet 2. Electricity: AC220V 50Hz, must have good grounding 3. gas: N/A 4. Workbench: size 600mm×600mm×700mm, bearing more than 50kg(a solid cement table is preferred). 5. Ventilation device: No special requirements
Main parameters (Specification)	1. Power supply interface: AC220V, 50Hz, 10A 2. Total power: ≤150W (excluding external vacuum pump) 3. Coating chamber (material): Polypropylene 4. Sample holder (vacuum chuck): Polypropylene chucks, Φ19mm and Φ60mm, one each 5. Operation mode: Up to 12 storable programs; each program includes 6 operating stages 6. Spin speed: 500 rpm – 10,000 rpm effective 7. Acceleration/deceleration rate: Adjustable range per stage: 100 rpm – 2000 rpm 8. Coating time: Time range per stage: 0–60s 9. Speed stability: ±1% 10. Control mode: PCB microcontroller, keypad control, LMC LCD display 11. Heating method: Not available
Product Dimension and Weight	12. Product Specifications： · Dimension：450mm×280mm×340mm · Weight：18kg

Standard Accessories

No.	name	qty	picture
1	Vacuum Chuck (including O-ring) (Ø19mm and Ø60mm)	2 pcs
2	Central Positioner/Locator (including 4 positioning studs)	1 pcs
3	Epoxy Injector/Syringe (20ml)	1 pcs
4	Injector/Syringe Bracket	1 pcs
5	Oilless Vacuum Pump	1 pcs
6	Rubber Pipe (including clamp)	1 pcs