EQ-TM106 Film Thickness Monitor
1. This lab Coating Inspection Instrument is a high-precision QCM film thickness monitor for MBE, OLED & sputtering. Ensure that the coating thickness meets the experimental requirements.
2. The equipment also features real-time rate control, 0.0136Å resolution, and PC data export.
3. The equipment comes with dedicated pre-sales and after-sales support. Should any equipment malfunctions or component damage occur, please contact us immediately; we provide a corresponding one-year warranty service (covering non-human-induced issues).
- Shenyang Kejing
- Shenyang, China
- 10 working days
- 50 sets
- Information
Introduction of the Film Preparation Thickness Monitor:
The EQ-TM106 Film Thickness Monitor utilizes the quartz crystal oscillation principle, combined with advanced frequency measurement technology, to perform real-time, in-situ monitoring of film thickness. It is primarily employed during thin-film deposition processes—such as those involving MBE, OLED thermal evaporation, and magnetron sputtering equipment—to provide continuous monitoring of both the film layer thickness and the deposition rate.
Based on the real-time deposition rate of the thin film, the EQ-TM106 monitor generates a PWM (Pulse Width Modulation) analog output signal. Functioning as a dedicated thickness sensor, it integrates with external controllers and evaporation power supplies to enable closed-loop rate control of the evaporation source, thereby facilitating precise measurement of the deposited film's thickness.
The EQ-TM106 Film Thickness Monitor features a compact design that conserves laboratory space; furthermore, its simple operating principle and user-friendly interface make it particularly well-suited for use in laboratory-scale thin-film deposition applications.
Product Technical Specifications:
| Product Name | EQ-TM106 Film Thickness Monitor | ||
| Product Model | EQ-TM106 | ||
| Technical Specifications | EQ-TM106-1 Monitoring Module 1. Power Supply: DC 5V (±10%), Max. Current 400mA 2. Frequency Resolution: ±0.03 Hz 3. Film Thickness Resolution: 0.0136 Å (Aluminum) 4. Film Thickness Accuracy: ±0.5% (dependent on process conditions, specifically sensor position, material stress, temperature, and density) 5. Measurement Speed: 100 ms – 1 s per measurement (configurable) 6. Measurement Range: 500,000 Å (Aluminum) 7. Standard Sensor Crystal: 6 MHz 8. Computer Interface: RS-232/485 Serial Interface (Configurable Baud Rates: 1200, 2400, 4800, 9600, 19200, 38400; Data Bits: 8; Stop Bits: 1; Parity: None) 9. Analog Output: 8-bit resolution, PWM (Pulse Width Modulation) output (Open Collector or Internal 5V Output) 10. Operating Environment: Temperature 0–50°C; Humidity 5%–85% RH (non-condensing) 11. Dimensions: 90 mm × 50 mm × 18 mm | ||
EQ-TM106-2 Display Unit 1. Input Power: AC 220V ±10% 2. Output Power: DC 5V 3A 3. Display: 12×2 Digital Tubes and LEDs 4. Communication Port: RS-485 (Selectable Baud Rates: 1200, 2400, 4800, 9600, 19200, 38400; Data Bits: 8; Stop Bits: 1; Parity: None) 5. Dimensions: 182mm × 65mm × 160mm | |||
EQ-TM106-3 Probe 1. Compatible Crystal Frequency: 6MHz 2. Compatible Crystal Size: Ø14mm 3. Mounting Flange: CF35 4. Cooling Water Tubing: Ø3mm; Lengths: 300mm, 500mm, 1000mm 5. Cooling Water Pressure: <0.3MPa 6. Pneumatic Shutter Tubing: Ø3mm 7. Compressed Air Pressure: <0.8MPa, >0.5MPa 8. Bake-out Temperature: <200°C (with water flow); Flange <100°C (without water flow) 9. Electrical Interface: BNC Socket | |||
| Standard Accessories | 1 | EQ-TM106-1 Monitoring Module | 1 unit |
| 2 | EQ-TM106-2 Display Unit | 1 unit | |
| 3 | EQ-TM106-3 Probe | 1 unit | |
Key Features of Thin Film Deposition Monitor:
1. This unit can be connected to a computer.
2. The display unit features a clean, intuitive, and well-organized interface, offering convenient and rapid operation. It provides a real-time visual display of operational parameters, including measured film thickness, deposition rate, frequency, and the percentage of the PWM control output.
3. Via either the software or the display unit, users can configure various settings—such as gate time, output mode, rate algorithm, material parameters, output range, and communication parameters—and can export the relevant measured data directly into an Excel file.
4. The device boasts a compact footprint, high measurement precision, simple operation, and user-friendly convenience.
Why Choose Shenyang Kejing?
When investing in precision material science equipment, you need more than just a supplier—you need a reliable technological partner.
· Proven Expertise: As an industry-leading automation equipment manufacturer, Shenyang Kejing delivers industrial-grade R&D solutions trusted by laboratories worldwide.
· Open Laboratory Experience: We don't just sell equipment; we prove its capability. We offer pre-sales product experiences and technical training through our dedicated Open Laboratory.
· Comprehensive Customization: Need specific modifications? We provide joint lab collaborations, project partnerships, and tailored equipment manufacturing to meet your exact scientific requirements.
· End-to-End Support: From material processing testing to patent commercialization support, our dedicated engineering team stands behind every product we build.
