Anti-Corrosion Spin Coater (6K RPM & 6" Wafer Max.)
VTC-200P Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The equipment can store 12 sets of programs, and each set contains 6 running stages. The upper cover of the chamber can heat the sample (optional function), which is beneficial to the coating process of thin film materials with high viscosity.
- Shenyang Kejing
- Shenyang, China
- 10 working days
- 50 sets
- Information
Product Introduction
The VTC-200P Vacuum Spin Coater is designed for surface coating processes in semiconductors, crystals, optical discs, lithography, and related applications. It is suitable for preparing coatings using strong acid or strong alkaline solutions.
The chamber itself cannot be evacuated; instead, during operation, the sample is fixed onto the substrate holder by vacuum chuck adsorption. The system can store up to 12 programs, each containing 6 sequential stages. Different rotation speeds can be set for each stage, allowing the coater to gradually accelerate to its maximum speed. This ensures uniform thin film formation on the sample surface while minimizing material waste.
The top cover of the chamber can be optionally equipped with a heating function, which facilitates the coating of highly viscous film materials.
With advantages such as easy operation, convenient cleaning, and compact design, the VTC-200P Vacuum Spin Coater is widely used in laboratories of universities and research institutes for thin-film preparation.
Main Features
1. The equipment can store 12 sets of programs, and each set contains 6 running stages. The setting range of the acceleration and deceleration rate for each stage: 100rpm/s-2000rpm/s, time range for each stage: 0-60s
2. The sample is fixed by means of vacuum adsorption, which is easy to operate.
3. The degree of vacuum can reach -0.08MPa.
4. Samples can be easily centered using the positioning tool to reduce vibration or fly-outs caused by misalignment.
5. Different chucks can be used according to sample specifications, and the replacement is convenient and simple.
6. A 24V brushless DC motor is adopted and it has the advantages of high reliability, strong adaptability, simple repair and maintenance, low noise, small vibration, stable operation, fast and stable startup, stable operation after acceleration, to ensure the consistency and uniformity of coating thickness.
7. This machine can be used in a glove box, but the control part and vacuum pump should be placed outside the box.
8. Coating can be carried out in an inert gas atmosphere (such as Ar, N2).
9. The oilless parallel-bar vacuum pump has the advantages of small size, simple structure, easy operation, convenient maintenance, and no environmental pollution.
10. The chamber is made of PP material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.
11. English operating system
12. It has the function of open-cover protection. When the top cover is opened during the coating process or at the end of the coating, the machine immediately decelerates rapidly until it stops.
13. The controller adopts a single control box with LCD numerical display, which is more intuitive and reliable.
Technical Parameters
Product Name | VTC-200P Vacuum Spin Coater | |
Product Model | VTC-200P | |
Installation Conditions | 1. Temperature & Humidity: 10–85%RH (at 25℃, non-condensing); Temperature: 0–45℃. 2. Environment: No strong vibration sources or corrosive gases near the equipment. 3. Water: The equipment is equipped with a drainage outlet. 4. Power Supply: Single-phase AC220V, 50Hz10A. 5. Air Supply: Vacuum negative pressure (vacuum pump) with a pumping speed ≥ 70 L/min. The system can also be connected to protective inert gas. 6. Worktable: Recommended size 800mm × 600mm × 700 mm, load capacity ≥ 100 kg (a solid concrete table is preferred). 7. Ventilation: No special requirements. | |
Main Parameters (Specification) | 1. Power Supply Interface: Fused power socket: AC220V, 50Hz; Fuse specification: 10A, φ5×20mm (AC110V 50/60Hz customization available). 2. Total Power: ≤150W (excluding external vacuum pump). 3. Main Chamber (Material): Polypropylene. 4. Substrate Holder (Vacuum Chuck): Ø100 mm polypropylene vacuum chuck ×1 (made of PTFE when equipped with heating function). 5. Operation Mode: Capable of storing 12 programs, each with 6 sequential stages. 6. Spin Speed: 500 rpm – 6000 rpm. 7. Acceleration/Deceleration Rate: Adjustable range per stage: 100 rpm – 2000 rpm. 8. Coating Time: Adjustable range per stage: 0 – 60 s. 9. Speed Stability: ±1%. 10. Control System: PCB microcontroller with keypad operation and LMC LCD display. 11. Heating Method: Not included in standard configuration (optional heating function available, with an independent temperature control system, not integrated with the main controller). 12. Heating Temperature: Customizable temperature range, RT – 100℃ (upper limit). 13. Heating Power: AC220V, 1000W. 14. Temperature Control Accuracy: ±2℃. | |
15. Product Specifications: · Dimension: · Main Unit：φ250mm×360mm · Control Box：330 mm × 380 mm × 150 mm · Weight：15kg |
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Standard Accessories
No. | name | qty | picture |
1 | Vacuum Chuck (φ100mm) | 1 pcs | |
2 | O-Ring | 1 pcs | - |
3 | Central Positioner/Locator (including 4 positioning studs) | 1 pcs |
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4 | Epoxy Injector/Syringe (20ml) | 1 pcs |
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5 | Injector/Syringe Bracket | 1 pcs | - |
6 | Oilless Vacuum Pump | 1 pcs |
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Optional Accessories
No. | name | functional type | picture |
1 | Vacuum Chuck of other specifications | (optional) | |
2 | Pipette (made in China) | (optional) | |
3 | Pipette (imported) | (optional) |
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Warranty
· One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
Logistics
