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1200℃ Split Vacuum Tube Furnace

1. The small tube furnace utilizes premium ABB electrical components, delivering superior quality and efficiency.
2. Temperature control precision reaches +/-1℃, ensuring accurate experimental results.
3. Constructed with high-purity alumina material to enhance heating efficiency.

  • Shenyang Kejing
  • Shenyang, China
  • 10 working days
  • 50 sets
  • Information

Description of small tube furnace:

The OTF-1200X-5S is a CE-certified small tube furnace with a maximum operating temperature of 1100°C. Its furnace tube is a 130mm (or 100mm) high-purity quartz tube. The furnace is equipped with a pair of stainless steel sealing flanges, enabling heat treatment of samples under vacuum or atmosphere protection conditions. For temperature control, the vacuum tube furnace supports 50-step ramping programs with ±1℃ accuracy. This vacuum tube furnace can anneal 5-inch wafers at maximum capacity.


Key features of the split tube furnace:

1. 5-inch quartz tube with hinged flanges; spacious chamber enables use as a box-type atmosphere furnace (eliminating split tube furnace chamber contamination issues).

2. Capable of annealing 4-inch substrates.

3. Can serve as a modular base for DIY ALD, CVD, PVD evaporation furnaces, rotary furnaces, etc. (For details, please call).

4. The split tube furnace utilizes high-purity alumina fiber as the furnace chamber material, with a high-temperature alumina coating on the surface to enhance heating efficiency.

5. The split tube furnace employs ABB electrical components.

Note: Hinged flange is optional.

small tube furnace

Technical Parameters of the Split Tube Furnace:

Product Model1200℃ Compact Split tube furnace (Vacuum Tube Furnace) (130mm Tube Diameter). OTF-1200X-5S

Basic Parameters of small tube furnace

Maximum Operating Temperature of split tube furnace: 1100℃ (<0.5 hours)

Continuous Operating Temperature of split tube furnace: 1000℃

Recommended Heating Rate of split tube furnace: ≤10℃/min

Heating Zone Length: 300mm

Heating Element: Mo-doped FeCrAl alloy

Voltage: AC220V 50Hz

Power: 3KW

Thermocouple: Type K

Structure of small tube furnace

Equipped with a pair of stainless steel sealing flanges, sealed with silicone gaskets.

Quartz tube dimensions: φ130x750mm.

Includes 2 alumina tube plugs. Place these at both ends of the furnace tube during operation to ensure sealing integrity of the constant-temperature zone and flanges.

The right-end flange features a KF25 interface for connecting a vacuum pump.

Vacuum Range: 10⁻² torr (using mechanical pump).

A mechanical pressure gauge is installed with a measurement range of -0.1 to 0.15 MPa.

The equipment employs PID temperature regulation and supports 50-step heating/cooling programs.

Equipped with over-temperature and thermocouple break protection.

Temperature Control of vacuum tube furnace

Vacuum tube furnace includes one YD858P temperature controller.

PID automatic temperature control system;

Intelligent 50-segment programmable control;

Built-in overheat protection and thermocouple fault alarm;

Temperature control accuracy: ±1°C;

Default DB9 PC communication port;

MET certified;

Optional PC temperature control software (for YD858P series controllers) available for controlling heating profiles and exporting data.

Vacuum System (Optional)

Dual rotary vane mechanical pump achieves vacuum level of 10⁻² Toor.

For higher vacuum (10⁻⁵ Toor or better), optional domestic or imported high-vacuum units are available.

Product Dimensions and Weight

Furnace lid closed dimensions of vacuum tube furnace: 440mm (L) x 440mm (W) x 460mm (H)

With flange supports (260mm each), total dimensions: 960mm (L) x 440mm (W) x 460mm (H)

Furnace lid open dimensions of vacuum tube furnace: 440mm (L) x 440mm (W) x 700mm (H)

With flange supports (260mm each), total length: 960mm (L) x 650mm (W) x 700mm (H)

Temperature controller unit of vacuum tube furnace: 260mm (L) x 350mm (W) x 410mm (H)

Weight of vacuum tube furnace: About 48KG

Certifications

This split tube furnace is CE certified.

Certificate No.: M.2021.206.C67997.

If the customer covers certification costs, our company guarantees individual units will pass German TUV certification or CAS certification.

Warranty Period

Split tube furnace has 1-year warranty, lifetime maintenance.

Special Note:

Consumables such as heating elements, quartz tubes, and samples are excluded. Damage caused by corrosive gases or acidic gases is not covered under warranty.

Compliance  CE Certified, UL or CSA certification is available at extra cost.


About our company:

The company promises lifelong technical support and continuous upgrades for all small tube furnaces. Whether it's software system updates or hardware feature expansions and upgrades, the company flexibly responds to customer needs. A well-managed spare parts inventory ensures off-the-shelf availability of common small tube furnace parts and rapid customization of specialized accessories, ensuring uninterrupted production and experimental use of small tube furnaces. The company also prioritizes customer feedback, conducting regular satisfaction surveys and return visits, and optimizing small tube furnace and service processes based on user suggestions, truly achieving the long-term goal of shared growth and win-win cooperation with customers.


vacuum tube furnace

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