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In the fields of modern materials science, semiconductor manufacturing, and optical engineering, the fabrication of highly uniform, defect-free thin films constitutes a critical stage within the entire R&D and production workflow. To meet the rigorous demands of cutting-edge research—specifically regarding film-forming environments, crystallization temperatures, and solution compatibility—the VTC-100PAD vacuum heating spin coater​ offers a comprehensive, efficient, and high-precision solution.

Degumming: Using the VTC-200-4P spray spin coater to use the wet degumming process, the organic solvent is dripped on the photoresist film on the surface of the pattern, so that the photoresist film is dissolved and removed, leaving a clean pattern. The coating equipment available for coating include VTC-100PA vacuum spin coater, VTC-100PA-Ⅰupper cover heating vacuum spin coater, VTC-100 vacuum spin coater 、VTC-200 vacuum spin coater, VTC-200PV vacuum rotary coating machine, VTC-200-4P spray rotary coating machine and VTC-100PA-UV ultraviolet spin coater. Different spin coater can be selected according to the specific process.