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Application of Spin Coater in Semiconductor Photolithography Process

Degumming: Using the VTC-200-4P spray spin coater to use the wet degumming process, the organic solvent is dripped on the photoresist film on the surface of the pattern, so that the photoresist film is dissolved and removed, leaving a clean pattern. The coating equipment available for coating include VTC-100PA vacuum spin coater, VTC-100PA-Ⅰupper cover heating vacuum spin coater, VTC-100 vacuum spin coater 、VTC-200 vacuum spin coater, VTC-200PV vacuum rotary coating machine, VTC-200-4P spray rotary coating machine and VTC-100PA-UV ultraviolet spin coater. Different spin coater can be selected according to the specific process.

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Working Principle, Characteristics and Application of Spin Coaters

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